Grinding Silicon Model

2016541 2 3 article in press 4 5 6 234567891011121314162229353637 384243 international journal of machine tools manufacture xx 2003 xxxxxx 4748 49 50 fine grinding of silicon wafers a mathematical model for grinding 51 marks 52 shidambaram a, z pei a,, sassir b 53 a department of industrial and manufacturing systems engineering, kansas state university, 237.